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portada aluminum nitride thin films - deposition for fabrication, characterization and fabrication of surfac
aluminum nitride thin films - deposition for fabrication, characterization and fabrication of surfacaluminum nitride thin films - deposition for fabrication, characterization and fabrication of surfacaluminum nitride thin films - deposition for fabrication, characterization and fabrication of surfac
Type
Physical Book
Publisher
Author
ISBN
3836469723
ISBN13
9783836469722
Categories

aluminum nitride thin films - deposition for fabrication, characterization and fabrication of surfac

Charlee Fansler (Author) · unknown · Physical Book

aluminum nitride thin films - deposition for fabrication, characterization and fabrication of surfac - charlee fansler

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Synopsis "aluminum nitride thin films - deposition for fabrication, characterization and fabrication of surfac"

aluminum nitride (aln) thin films can be used for many device applications; for example, surface acoustic wave (saw) devices, microelectromechanical systems (mems) applications, and packaging applications. in this work, aln is the critical layer in th ...

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