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portada Doping Engineering for Front-End Processing: Volume 1070 (Mrs Proceedings)
Type
Physical Book
Publisher
Year
2014
Language
English
Pages
336
Format
Paperback
ISBN13
9781107408548
Edition No.
1
Categories

Doping Engineering for Front-End Processing: Volume 1070 (Mrs Proceedings)

New Book Imported to South Africa
Delivery: 05 Oct - 13 Oct Shipping: 5 to 6 business days.
R 773
R 773

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Synopsis "Doping Engineering for Front-End Processing: Volume 1070 (Mrs Proceedings) "

Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

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