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portada electroceramic-based mems
electroceramic-based memselectroceramic-based mems
Type
Physical Book
Publisher
Language
English
Pages
414
ISBN
0387233105
ISBN13
9780387233109
Categories

electroceramic-based mems

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Synopsis "electroceramic-based mems"

the book is focused on the use of functional oxide and nitride thin films to increase functionality and application range of mems (microelectromechanical systems) in the large sense, including micro-sensors, micro-actuators, and electronic components for high frequency communications. the book covers major topics and is divided into two parts (a) applications and emerging applications, and (b) materials, fabrication technologies, and functioning issues.

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