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portada Flash Lamp Annealing: From Basics to Applications
Type
Physical Book
Author
Publisher
Language
English
Pages
288
Format
Hardcover
Dimensions
23.4 x 15.6 x 1.9 cm
Weight
0.61 kg.
ISBN13
9783030232986
Categories

Flash Lamp Annealing: From Basics to Applications

Lars Rebohle (Author) · Slawomir Prucnal (Author) · Denise Reichel (Author) · Springer · Hardcover

Flash Lamp Annealing: From Basics to Applications - Rebohle, Lars ; Prucnal, Slawomir ; Reichel, Denise

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Synopsis "Flash Lamp Annealing: From Basics to Applications"

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.

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The binding of this edition is Hardcover.

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