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portada Rapid Thermal Processing of Semiconductors
Type
Physical Book
Author
Publisher
Language
English
Pages
358
Format
Paperback
Dimensions
23.4x15.6x2 cm
Weight
0.54 kg.
ISBN13
9781489918062
Categories

Rapid Thermal Processing of Semiconductors

Victor E. Borisenko (Author) · Peter J. Hesketh (Author) · Springer · Paperback

Rapid Thermal Processing of Semiconductors - Borisenko, Victor E. ; Hesketh, Peter J.

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Synopsis "Rapid Thermal Processing of Semiconductors"

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

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