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portada Plasma-Surface Interactions and Processing of Materials
Type
Physical Book
Publisher
Author
Language
English
Pages
558
Format
Paperback
Dimensions
23.4x15.6x3 cm
Weight
0.79 kg.
ISBN13
9789401073691
Categories

Plasma-Surface Interactions and Processing of Materials

Auciello, O. ; Gras-Martí, Alberto ; Valles-Abarca, Jose Antonio (Author) · Springer · Paperback

Plasma-Surface Interactions and Processing of Materials - Auciello, O. ; Gras-Martí, Alberto ; Valles-Abarca, Jose Antonio

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Synopsis "Plasma-Surface Interactions and Processing of Materials"

An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials. The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.

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